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Frequently Asked Questions

Summary Of Different Clean Room Standards

US FED STD 209E Cleanroom standards
particle/ft³
Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 5 µm
1 35 7 3 1  
10 350 75 30 10  
100   750 300 100  
1000       1000 7
10,000       10,000 70
100,000       100,000 700

Please note that the US FED standard 209E was cancelled on November 29th 2001 and has been superseded by ISO 14644

ISO 14644-1 Cleanroom standards
particle/m³
Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm
ISO 1 10 2        
ISO 2 100 24 10 4    
ISO 3 1,000 237 102 35 8  
ISO 4 10,000 2,370 1,020 352 83  
ISO 5 100,000 23,700 10,200 3,520 832 29
ISO 6 1,000,000 237,000 102,000 35,200 8,320 293
ISO 7       352,000 83,200 2,930
ISO 8       3,520,000 832,000 29,300
ISO 9       35,200,000 8,320,000 293,000
Cleanroom class comparison between US FED 209E and ISO 14644-1
ISO 14644-1 FED STD 209E
ISO 3 1
ISO 4 10
ISO 5 100
ISO 6 1,000
ISO 7 10,000
ISO 8 100,000
BS 5295 Cleanroom standards
particle/m³
Class 0.5 µm 1 µm 5 µm 10 µm 25 µm
Class 1 3,000   0    
Class 2 300,000   3,000 30  
Class 3   1,000,000 20,000 4,000 300
Class 4     200,000 40,000 400

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