Frequently Asked Questions
Summary Of Different Clean Room Standards
US FED STD 209E Cleanroom standards
| particle/ft³ |
| Class |
0.1 µm |
0.2 µm |
0.3 µm |
0.5 µm |
5 µm |
| 1 |
35 |
7 |
3 |
1 |
|
| 10 |
350 |
75 |
30 |
10 |
|
| 100 |
|
750 |
300 |
100 |
|
| 1000 |
|
|
|
1000 |
7 |
| 10,000 |
|
|
|
10,000 |
70 |
| 100,000 |
|
|
|
100,000 |
700 |
Please note that the US FED standard 209E was cancelled
on November 29th 2001 and has been superseded by ISO 14644
ISO 14644-1 Cleanroom standards
| particle/m³ |
| Class |
0.1 µm |
0.2 µm |
0.3 µm |
0.5 µm |
1 µm |
5 µm |
| ISO 1 |
10 |
2 |
|
|
|
|
| ISO 2 |
100 |
24 |
10 |
4 |
|
|
| ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
| ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
| ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
| ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
Cleanroom class comparison between US FED 209E and ISO 14644-1
| ISO 14644-1 |
FED STD 209E |
| ISO 3 |
1 |
| ISO 4 |
10 |
| ISO 5 |
100 |
| ISO 6 |
1,000 |
| ISO 7 |
10,000 |
| ISO 8 |
100,000 |
BS 5295 Cleanroom standards
| particle/m³ |
| Class |
0.5 µm |
1 µm |
5 µm |
10 µm |
25 µm |
| Class 1 |
3,000 |
|
0 |
|
|
| Class 2 |
300,000 |
|
3,000 |
30 |
|
| Class 3 |
|
1,000,000 |
20,000 |
4,000 |
300 |
| Class 4 |
|
|
200,000 |
40,000 |
400 |
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